| 标题 |
Synthesis of Silica-Coated Ceria Particles for STI-CMP in a Single Step by Flame Spray Pyrolysis with an Emulsion |
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| DOI | |
| 其它 |
期刊:Journal of The Electrochemical Society 作者:Shin Ae Song; Seung Bin Park 出版日期:2011-01-01 |
| 求助人 | |
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(2025-6-4)