| 标题 |
Flat-fop femtosecond laser-induced thinning of SiC wafer substrate: Mechanisms, defect control, and process optimization |
| 网址 | |
| DOI | |
| 其它 |
期刊:Optics & Laser Technology 作者:Yuhang Li; Lei Chen; Haiyan Shi; Xurui Peng; Zhe Zhang; Zichen Zhang 出版日期:2026 |
| 求助人 | |
| 下载 |
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