| 标题 |
Plasma-assisted polishing with self-limiting surface modification for sub-nanometer finishing of AlN ceramics |
| 网址 | |
| DOI | |
| 其它 |
期刊:Ceramics International 作者:Tong Tao; Rongyan Sun; Yuji Ohkubo; Kazuya Yamamura 出版日期:2026-02-10 |
| 求助人 | |
| 下载 |
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(2025-6-4)