| 标题 |
Effects of organic compounds rich in phosphate functional groups as multifunctional inhibitors on copper film chemical-mechanical polishing properties: Combined experiment and theoretical calculation |
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| DOI | |
| 其它 |
期刊:Tribology International 作者:Changxin Dong; Xinhuan Niu; Chao He; Xinjie Li; Zheng Wu; et al 出版日期:2024-09-24 |
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(2025-6-4)