Modeling and Experiment on the Piezoelectric Bimorph Micro Robot

The impact drive mechanism(IDM) of the micro robot based on piezoelectric bimorph actuator was analyzed in this paper.The equivalent electrical model of the piezoelectric bimorph actuator was established,and the Finite Element Method(FEM) was used for model analysis.The electrical and actuating signal frequency parameters of the bimorph actuator were obtained by using FEM.Experiments were carried out to evaluate the micro robot′s velocity and force,and experiment results showed a good motion feature.