Evaporation characteristics of titanium oxides

TiO_2 thin films were prepared with Ti_2O_3,Ti_3O_5 and TiO_2 as original materials by electron-beam evaporation deposition,using O~(2-) ion beam(O_2 purity up to 99.99%) as auxiliary means.XRD was used to investigate the phase composition of different film materials and thin films and their evaporation characteristics,with the transmittance of thin film measured by spectrophotometer to analyze their optical properties.Test results showed that there are the congurent solid evaporation phases of Ti_2O_3 in titanium oxides during evaporation/dissolution in such a thin film preparation process.