Atomic-Scale Engineering and Strain Modulation of Quantum Defects in Hexagonal Boron Nitride

Understanding and engineering atomic defects in hexagonal boron nitride (hBN) provides a powerful platform for realizing solid-state quantum emitters and spin qubits, advancing the field of quantum information science and technologies. However, the full potential of such quantum defects remains locked by the critical lack of a deterministic structure–property relationship at the atomic scale. Here, we demonstrate a strategy to atomically engineer and decipher quantum defects in hBN by integrating scanning tunneling microscopy/spectroscopy (STM/STS) and noncontact atomic force-microscopy with a CO-functionalized tip. We implemented controllable argon ion bombardment to create both boron vacancies (VB) and nitrogen vacancies (VN) in submonolayer hBN grown on Cu(111). Simultaneously, encapsulated Ar species trapped between hBN and Cu(111) locally lift the hBN to form nanobubbles, thereby decoupling atomic vacancies from the metal substrate and enabling direct probing of their electronic states. For the on-bubble VN, STS measurement reveals a prominent in-gap state with a phonon replica. Furthermore, with aid of STM tip-assisted manipulation, we demonstrate that the tuning of nanobubble sizes modulates their strain profile, thereby modulating the energetic positions of electronic states in on-bubble defects, corroborated by density functional calculations. Our studies offer insight into the intrinsic defect structures in hBN and quantum defect engineering via local strain engineering.