Design and Modeling of a Decoupled 2-DOF Stick-slip Positioning Stage

A two degree-of freedom (2-DOF) stick-slip positioning stage is proposed and analyzed. The piezoelectric actuator is developed to realize large stroke positioning based on stick-slip principle. A clamping mechanism is utilized to adjust the normal force at the friction interface, and a hybrid decoupling configuration is adopted to eliminate the cross-coupling error. The working principle is discussed, and finite element analysis is conducted to explore the characteristics of driving unit. In addition, the dynamic model of positioning system based on LuGre friction model is also simulated in Matlab/Simulink. The simulation results indicate that proposed positioning stage exhibits good dynamic performance.