Large-scale preparation of 22.06% efficiency single-crystalline silicon solar cells with inverted pyramid microstructure through nanostructure rebuilding treatment

Abstract The inverted pyramid microstructures (IPMS) were fabricated jointly by metal-assisted chemical etching (MACE) technology with extremely low concentration of silver ions to formed nanopores and nanostructure rebuilding (NSR) treatment of NH 4 HF 2 solution. The results show nanopores were achieved with the aid of Ag-MACE technology, which diameter was mainly affected by the action of Ag ions, and depth was yet mainly influenced by HF concentration. Textured IPMS single-crystalline silicon (sc-Si) solar cells with the diameter of 1 μ m and reflectivity of 8.62% were large-scale prepared. Benefiting from better light-trapping ability, the photoelectric conversion efficiency of IPMS sc-Si solar cells in standard size of 156.75 × 156.75 mm 2 achieved 22.06%. Simultaneously, the short-circuit current was increased by 71 mA. This promising technology could become a viable solution for industrial production of highly efficient sc-Si solar cells in the foreseeable future.