Frequency-shaped Sliding Mode Control of Isolation Table Equipped with Precision devices

This paper presents the design of an active vibration suppression controller for an air-spring type vibration isolation table. Firstly, isolation system model is constructed considering the isolation table, attached equipment and voice-coil actuator. An active control system is designed based on frequency-shaped sliding mode control theory rewarding high frequency uncertainties with respect to attached equipments on the isolation table. Finally. the performance of the active isolation system is evaluated by simulation under some disturbance conditions which are transmitted from base structure of the isolation system.