Fabrication of heater‐integrated MEMS tactile sensor for evaluation of warm and cold sensation by touching glass

Abstract The paper addresses fabrication and characterization of a MEMS tactile sensor sensitive to force and temperature with an on‐chip heater and a contact part of thermally conductive elastomer. The temperature response of this sensor due to heat transfer when it was in contact with the glass plate was measured. As a result, it is demonstrated that fabricated sensor can detect thermally difference due to differences in the surface treatment of the glass.