The influence of material and thickness of window layer as well as back contact barrier were researched on photovoltaic performance of amorphous silicon germanium thin film solar cell using AMPS program. The simulation found that the amorphous silicon carbon with the band gap of 1. 92 e V is more suitable for the window layer of the solar cell. The thinner the window layer,the better the performance of solar cell. The simulation also shows that the lower the back contact barrier,the better the performance of the solar cell. The conversion efficiency of solar cell will not be affected by the back contact barrier when the back contact barrier is between 0. 11 ~ 0. 51 e V.