A Study Of Material Properties Of Zn0 Thin Films Deposited By Direct Current Magnetron Sputtering

This thesis demonstrates particular methodology developed for growing zinc oxide (ZnO) thin films by direct current (DC) plasma magnetron sputtering deposition technique,as well as ZnO films application for transparent untraviolet (UV) sensor. The scope of the thesis entails the development of the processing technology for the fabrication of ZnO films.