T0302-2-1 The study of micro sensor using surface acoustic wave
作者
Yoshinobu Murakawa,Sumito Nagasawa,Hiroki Kuwano
出处
期刊：Nenji Taikai koen ronbunshu [The Japan Society of Mechanical Engineers] 日期：2010-01-01卷期号：2010.8: 253-254
标识
DOI：10.1299/jsmemecjo.2010.8.0_253
摘要
In this study, a surface acoustic wave (SAW) gas sensor device is proposed for ubiquitous sensor networks to monitor environment. The propagation characteristics of SAW is changed by mass change at SAW substrate surface. The interdigital electrodes and detector film of the SAW gas sensor were fabricated and evaluated by Vector Network Analyzer.
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(2025-6-4)
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