High resolution electron microscopy and microanalysis

Abstract While high resolution electron microscopy has been in use for many years, with steadily improving image resolution, most modern microscopes can provide complementary information on the chemical composition of very small volumes of material. This advance is very important and enormously extends the range of practical applications for the electron microscope. This review describes the basic principles and techniques of high resolution imaging and analysis, in both the conventional and scanning electron microscope, noting in each case the resolution that may be achieved.