CONTROL-ORIENTED MODELING OF 2D TORSIONAL MICROMIRROR

This paper presents a simplified model of 2D torsional micromirror for control design. The micromirror system is modeled as a two inputs two outputs (TITO) system with nonlinear electrostatic torques, which are coupled with the two inputs and the two tilt angles. The coupling property of the electrostatic torques makes it difficult to design the control law. To surmount the problem, a new model based on extracting the dominant nonlinear terms and Taylor's expansion is proposed. The micromirror system together with the simplified model is coded in Matlab™ S-function. The simulation result shows that the model is feasible for control design.