光子学
制作
稳健性(进化)
宽带
计算机科学
光子集成电路
电子工程
天文干涉仪
硅光子学
分路器
波导管
光学工程
材料科学
分束器
光子晶体
光电子学
收发机
光刻
信号处理
逻辑门
干涉测量
半导体器件建模
可靠性(半导体)
工程类
光学滤波器
平版印刷术
功率(物理)
背板
绝缘体上的硅
薄脆饼
作者
Aycan Deniz Vit,Kazim Görgülü,Ali Najjar Amiri,Bahrem Serhat Danis,Ujal Rzayev,Ahmet Onur Dasdemir,Abdullah Mağden,Emir Salih Magden
标识
DOI:10.1109/jlt.2025.3621420
摘要
We propose a systematic approach to design complex and universally capable deep photonic networks with inherent robustness to fabrication-induced variations. We first create a framework that incorporates layers of variation-aware, custom-designed Mach-Zehnder interferometers and virtual wafer maps to optimize integrated photonic devices under fabrication imperfections. Using this framework, we propose designs for silicon-based, broadband 50/50 splitters and 5% power taps demonstrating transmissions within ±2% and ±1.5% of their respective targets across the 1.5-1.6 μm spectrum, even in the presence of fabrication variations of ±15 nm in waveguide width and ±10 nm in thickness. Due to their consistent performance under fabrication-induced variations, we show that the potential fabrication yield for these tolerant devices is drastically higher than traditional devices. Our results underscore the effectiveness of the deep photonic network architecture in building layout-aware photonic systems, showcasing a realistic pathway towards creating inherently robust geometries with consistent performance for maximum yield and device reliability in future photonic applications.
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