Microflotronics: A Flexible, Transparent, Pressure‐Sensitive Microfluidic Film

There is an increasing demand for sensitive, flexible, and low‐cost pressure sensing solutions for health monitoring, wearable sensing, robotic and prosthetic applications. Here, the first flexible and pressure‐sensitive microfluidic film is reported, referred to as a microflotronic, with high transparency and seamless integratability with the state‐of‐the‐art microelectronics. The microflotronic film represents the initial effort to utilize a continuous microfluidic layer as the sensing elements for large‐area dynamic pressure mapping applications, and meanwhile an ultrahigh sensitivity of 0.45 kPa−1 has been achieved in a compact, flexible, and transparent packaging. The response time of the device is in the millisecond range, which is at least an order of magnitude faster than that of its conventional flexible solid‐state counterparts. In addition, the fabrication process of the device is fully compatible with the industrial‐scale manufacturing of capacitive touchscreen devices and liquid‐crystal displays. The overall device packaging can be as thin as 200 μm with an optical transparency greater than 80%. Several practical applications were successfully demonstrated, including surface topology mapping and dynamic blood pressure monitoring. The microflotronic devices offer an alternative approach to the solid‐state pressure sensors, by offering an unprecedented sensitivity and ultrafast response time in a completely transparent, flexible and adaptive platform.