The glow discharge polymerization of a CF4/CH4 mixture was investigated by using infrared spectroscopy and ESCA in comparison to the glow discharge polymerization of tetrafluoroethylene. The polymers prepared from a CF4/CH4 mixture (70/30 molar ratio) as well as from tetrafluoroethylene possess low surface energy compared with that of conventionally polymerized polytetrafluoroethylene. The infrared spectrum of the polymer from a CF4/CH4 mixture was fairly different from that of the polymer prepared from tetrafluoroethylene by glow discharge polymerization, which had an almost identical spectrum to that of conventionally polymerized polytetrafluoroethylene. Unanticipated residues included C˭C, C˭CF, C-F, NO2 and C-O groups, O in addition to the expected C-F groups. The formation of these residues was discussed.