铌酸锂
功率分配器和定向耦合器
材料科学
电子束光刻
分束器
光学
极化(电化学)
光电子学
光子集成电路
消光比
光子学
分路器
平版印刷术
物理
抵抗
纳米技术
激光器
波长
化学
物理化学
图层(电子)
作者
Yinan Wu,Xuerui Sun,Hao Li,Chuanyi Lu,Yuting Zhang,Shijie Liu,Yuanlin Zheng,Xianfeng Chen
标识
DOI:10.1109/jlt.2022.3203409
摘要
Polarization devices on lithium niobate thin film (LNTF) are vital components for photonic integrated circuits (PICs) on the novel platform. Because both linear and nonlinear devices on the anisotropic platform are intrinsically polarization-dependent. Here, we demonstrate compact polarization beam splitters (PBS) on LNTF based on two asymmetric directional couplers with an effective length of only 180 μm. The PBS is fabricated via a single-step electron beam lithography (EBL) and inductively coupled plasma (ICP) etching process. Our device shows efficient PBS operation at the telecom bands with an extinction ratio over 26 dB and 13 dB for fundamental TE and TM modes, respectively. The device holds promise for efficient on-chip polarization division multiplexing and polarization manipulation, which would become an indispensable component in future LNTF PICs.
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