Comparison of electronic stopping cross sections for channeled implantation of Al ions between the 〈0001〉 and 〈11 2 ¯ 3〉 directions in 4H-SiC

Abstract Electronic stopping cross sections ( S e ) for channeled implantation of Al ions in 4H-SiC were compared between the 〈0001〉 and 〈11 2 ¯ 3〉 directions. We first modeled S e for random implantation ( S e random ) by combining the Firsov equation at an Al-ion energy E < 8.6 MeV with the constant (i.e. 4.22 × 10 −13 eV cm 2 /atom) at E > 8.6 MeV. We then assumed S e for channeled implantation being k S e random and fitted k to the reported maximum channeled ranges of 18−20 MeV Al in 4H-SiC. The resultant k 〈112̄3〉 of 0.53 being smaller than k 〈0001〉 of 0.70 was consistent with the difference in the maximum impact parameters.