Preparations, Electroconductivity, and Tribological Properties of the Lubricative and Conductive Difunctional NbSe2 Films

The special needs of some fields, such as aerospace and semiconductor manufacturing, are stimulating research on conductive and lubricative materials. This study used magnetron sputtering technology to prepare NbSe₂ functional films with metal-like conductivity and MoS₂-like lubricity. The composition, structure, and performance of NbSe₂ films deposited under different processes were systematically analyzed by a series of characterization methods. The results indicate that only suitable argon flow and bias voltage are conducive to promoting the crystallization and densification of the NbSe₂ film, giving it high adhesion strength and low static contact resistivity. Compared with the traditional MoS₂ film, the contact voltage of the optimized NbSe₂ film is reduced by 3/4, and the wear rate is reduced by more than half under the current-carrying conditions. The friction and wear mechanisms of NbSe₂ films under current-carrying conditions finally were revealed by analysis of friction contact interface behaviors. This NbSe₂ film with both good lubricity and good conductivity will become an irreplaceable candidate for the development of multifunctional lubricating materials in response to emerging scenarios.