Compact and low loss silicon carbide waveguide with high nonlinearity based on CMOS-compatible platform

Silicon carbide ring resonator is demonstrated with intrinsic Q-factor of 160,000. Waveguide with nonlinear parameter 40W-1/m is demonstrated. Material Kerr nonlinearity is measured to be 4.8 ×10−14cm2/W and three photon absorption coefficient is around 0.01cm3/GW2.