A bi-directional linear ultrasonic motor based on stator compound vibration

A bi-directional linear ultrasonic motor (LUSM) based on multi-vibration of the piezoelectric (PZT) ceramic are proposed, designed, fabricated, and tested in this paper. The PZT ceramics with parallelogram cross-sections are positioned at both ends of the elastomer. Both torsional and longitudinal vibration modes co-occur when AC voltage is applied to PZT ceramics. In the elastomer, the longitudinal and bending modes are then formed. The motor can work on two hybrid vibration modes by changing the size of the stator and the voltage excitation scheme. The finite element method optimizes the motor design and modifies the motor size. The resonance frequencies of the two modes are extremely near, and the driving foot’s trajectory is acquired to evaluate the design’s reasonableness. A prototype is created, and an experimental investigation of the motor characteristics is presented. The results indicate that under a voltage of 1080 V p-p , the proposed motor produces a forward velocity and thrust force of 37.04 mm/s and 0.22 N and a backward velocity and thrust force of 36.36 mm/s and 0.21 N.