光刻
材料科学
可靠性(半导体)
晶体管
纳米技术
过程(计算)
制作
纳米
数码产品
有机电子学
计算光刻
计算机科学
电气工程
电压
抵抗
工程类
多重图案
图层(电子)
复合材料
替代医学
量子力学
功率(物理)
病理
物理
操作系统
医学
作者
Tommy Meier,Yeohoon Yoon,Laura Teuerle,Ali Solgi,Karl Leo,Hans Kleemann
标识
DOI:10.1557/s43579-023-00498-0
摘要
Abstract Photolithography is believed to be a complementary technique to large-area printing, allowing for nanometer-scale integration and offering cost-efficiency. For organic electronics though, adapting photolithography is very challenging due to chemical incompatibilities. However, with the help of Alexander Zakhidov, orthogonal resins opened up the prospect of adapting the well-established process of photolithography for organic electronics. Here, we present a hybrid fabrication method for organic electrochemical transistors by combining orthogonal photolithography and inkjet printing, enabling high uniformity and reliability. We demonstrate how the resolution of each process affects the uniformity, and we explore the advantages of this process for device scaling and circuit integration. Graphical abstract
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