Phase shifting interferometer of a femtosecond laser for optical surface measurement
作者
Yue Wang,Shilin Xiong,Guanhao Wu
标识
DOI:10.1109/cleopr.2017.8119067
摘要
We demonstrate a low coherence phase shifting interferometer of a femtosecond laser for optical surface measurement. Phase shifting is realized by sweeping the repetition rate instead of the mechanical scanning. With this method, we reconstruct a glass slide surface which agrees well with that measured by a commercial Fizeau interferometer.