Photonic Phase Modulation via Exciton-Polaritons in Tungsten Disulfide Monolayers Synthesized by Metalorganic Chemical Vapor Deposition

This data package includes information on sample preparation, growth conditions and characterization results for the WS2 sample reported in the main body of the manuscript entitled “360-degree Phase Modulation using Exciton-Polaritons in a Two-Dimensional Superlattice” by Jason Lynch, et al. The WS2 sample was grown by metalorganic chemical vapor deposition (MOCVD) on 2" c-plane sapphire substrates in the NSF 2D Crystal Consortium facility at Penn State (MOCVD1). The data includes recipe file from the MOCVD equipment and data files from atomic force microscopy (AFM), field emission scanning electron microscopy (FE-SEM) and room temperature photoluminescence and Raman spectroscopy carried out on the samples. Characterization was typically done at the center of the 2" wafer and near the wafer edge (approximately 5 mm from wafer edge on opposite side to the flat) unless otherwise specified. The WS2 monolayer grown as part of this study is included in the data package: MCV1-230410A-CC.