Tungsten oxide thin films: detection and trapping of hazardous gases

Synthesis of tungsten (W) and tungsten tri-oxide (WO3) thin films on alumina substrate by a peculiar Red-ox reaction route using hot-filament chemical vapor deposition technique is described. The resulting tungsten and tungsten oxide films were characterized using various techniques such as x-ray diffraction (XRD), Raman spectroscopy and Scanning electron microscopy (SEM). XRD results revealed the complete conversion of cubic phase of pure tungsten into monoclinic phase of tungsten oxide. Raman spectroscopic analysis also confirmed the formation of WO3. SEM images show considerable alteration in morphology from well faceted particles to wafers when pure W-film was converted to WO3 film. The wafer like morphology of WO3 films is found to be suitable for gas sensing towards hazardous gases such as NO2 and NH3. The WO3 films showcased their highly responsive nature towards NO2 gas with exceptionally high gas sensitivity ~32. WO3 film demonstrated longer recovery time towards NO2 gas unlike NH3 gas making them attractive for their utilization in 'Newer application' such as a catalyst support material in catalytic converter devices which are potential representatives to arrest pollutant gases (NO2) getting flown into the living environment.