The CdTe solar cell is one of the most popular thin film PV devices,and CdS is used as a suitable window layerfor CdTe-based photovoltaic systems.The CdS films here were prepared by chemical bath depostion(CBD) and closed space sublimation(CSS).The complete CdTe/CdS solar cell devices were fabricated and analyzed.It was found that the films prepared by the CSS method have larger grains and better optical/electrical properties.The photoelectric conversion efficiency of such a solar cell comes up to 10.9%.The films deposited by CSS method is fast in vacuum system and suitable for commercial applications.