Diamond-like carbon thin films prepared by rf-plasma CVD

The depositing process, growing rate, structure, and optical properties of Diamondlike Carbon (DLC) films have been studied. It's shown that in the DLC films approximating amorphous carbon and diamond coexist from TED and Raman spectra, and the IR absorption is very low in 2.5 - 14.0 micrometers wavelength range from IR spectrophotometer. The other properties of this films such as chemical, thermal stability, mechanical, and adhesion are discussed. Finally, efficient, durable antireflection and protective coatings on IR optics are described.