The Planar Spiral-shaped Coil and Interdigatial Capacitor Parameter Designs of Micro ICP Source

This paper introduced a novel microfabricated ICP( inductively coupled plasma) source which adopted a planar spiralshaped coil. This novel microfabricated ICP was based on PCB(printed circuit board) technology. When the RF frequency was 13.56MHz the author ignited the ICP source. Give the photographs of the argon plasma torches. This paper introduced the parameter design of in detail. Give the design drawings and the photographs of the planar spiral-shaped coil and the interdigitated capacitor which were process on the PCB. The width of microstructure lines and gap between them were several microns. At last,the potential application area of the planar spiral-shaped coil and the interdigitated capacitor was presented.