材料科学
薄膜
制作
激光烧蚀
含氟聚合物
沉积(地质)
脉冲激光沉积
聚四氟乙烯
聚合物
烧蚀
激光器
光电子学
有机半导体
纳米技术
复合材料
光学
医学
古生物学
替代医学
物理
工程类
病理
航空航天工程
沉积物
生物
作者
Fumihiko Kannari,Takeo Fujii
出处
期刊:The Review of Laser Engineering
[Laser Society of Japan]
日期:1995-01-01
卷期号:23 (8): 625-639
被引量:3
摘要
In spite of its recognized potential, studies on thin film deposition of organic systems by laser ablation are so far limited in number. In this paper, experimental results of the fabrication of polymer and non-polymer organic thin films by pulsed laser ablation are described. We succeeded in fabrication of crystalline thin films of polytetrafluoroethylene (PTFE) with an F2 laser (157 nm). In this fluoropolymer deposition, cluster formation in the ablation plume under-200 mTorr Ar ambient gas keeps the bulk composition of the target in the films. PTFE thin films containing semiconductor CdTe microcrystallites, which exhibit a 3rd-order optical nonlinearity, were also fabricated in all ablation processes. These techniques were extended to non-polymer organic materials such as copper-phthalocyanine (CuPc) and 4-dialkylamino-4-nitrostilbene (DANS).
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