材料科学
化学镀
铜
相容性(地球化学)
金属化
同种类的
沉积(地质)
微观结构
纳米技术
半导体
电子包装
数码产品
杂质
柔性电子器件
冶金
粘附
化学气相沉积
表征(材料科学)
薄板电阻
真空沉积
集成电路
半导体器件
作者
Mustehsin Ali,Xin Zhuo,Jun Li,Ling Wang,Yi Huang,Honglei Wang,Mao Zhang,Xinyun Wang,Binghui Deng
摘要
ABSTRACT Electroless copper (Cu) deposition has become a viable and scalable metallization deposition method for through‐glass vias (TGVs) and glass‐based interposers. The advancements in electroless Cu deposition processes that address surface activation, adhesion mechanisms, and homogeneous metallization are highlighted. Metallization techniques that improve nucleation, stress management, and interface stability are shown by the activation method and comparisons with Pd‐free catalysts. Research on microstructure characterization and modeling provides an explicit relationship among bath composition, deposition rate, and mechanical integrity of the Cu layer. Overall, the electroless deposition of Cu provides several benefits, such as low cost, good conformality, and wide compatibility of substrates, but it still has limitations with bath stability, impurity management, and ecological sustainability. Future directions for attaining high‐performance, reliable metallization in next‐generation semiconductor packaging include stress‐engineered interfaces, optimization of green chemistry parameters, and activation with nanomaterials.
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