Design and finite element analysis of a vacuum chuck for weak rigid body parts

In order to measure the figure change of weak rigid body parts by a 4D interferometer, a groove ring vacuum chuck is designed to easily absorb the weak rigid body parts. Using the vacuum chuck to adsorb the object could keep it even under the force and maintain stable. Based on the principle of vacuum chuck technology, we use a 3D visual solid simulation software called Inventor to model the chuck, then use finite element software ANSYS to solve fluid dynamics and structural static analysis of the vacuum chuck. Different parameters that affect the performance of the chuck are analyzed, and the optimum values of these parameters are hence obtained, which provide an important means for designing the vacuum chuck to hold weak rigid body parts for further precision measurement or processing.