Core-shell diamond-like silicon photonic crystals from 3D polymer templates created by holographic lithography

Diamond-like silicon photonic crystals were fabricated by sequential chemical vapor deposition of silica and silicon on polymer templates photopatterned by holographic lithography. The optical properties of the 3D crystals after each processing step were measured and compared to the corresponding bandgap simulation. The core-shell morphology formed during CVD process is approximated using two level surfaces.