Fractional Order Based Modeling and Identification of Coupled Creep and Hysteresis Effects in Piezoelectric Actuators

Accurate modeling and identification of piezoelectric actuators are increasingly demanded for intelligent micro-nano manufacturing to improve the accuracy of positioning and scanning. In this article, one coupled fractional-order creep and hysteresis model is established using only five parameters. Then, the properties of the coupled fractional-order creep and hysteresis are investigated under sinusoidal and step inputs. The identification approaches are thus proposed by leveraging the special characteristics of the proposed fractional-order model. Simulation and experimental studies are carried out to validate the effectiveness of the proposed fractional-order creep and Bouc-Wen hysteresis model. Additionally, model-based inversion feedforward is implemented to validate the parameter identification. The experimental results demonstrate the effectiveness of the modeling and parameter identification approaches.