微通道
材料科学
脆性
基质(水族馆)
电介质
复合材料
微通道板探测器
光学
纳米技术
光电子学
探测器
海洋学
物理
地质学
作者
V. P. Bessmeltsev,Denis N. Katasonov,N. V. Goloshevsky,Sergey Baev
标识
DOI:10.4028/www.scientific.net/msf.1031.141
摘要
A method of forming arbitrarily shaped microchannels on substrates of brittle dielectric materials, such as optical glasses and optical crystals, is considered. This method makes it possible to ensure the identity of microchannel edges over the entire perimeter
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