Studies on Preparation and Performance of Solid State Thin Film LiPON Electrolyte

Amorphous solid state lithium phosphorous oxynitride (LiPON) electrolyte thin films are deposited by RF magnetron sputtering of a Li_3PO_4 target in nitrogen atmosphere. The r.f.-power is 150W and the N_2 pressure is 1.5 Pa. The results shows that the ionic conduction of the electrolyte thin film is 3×10~ -6 S/cm, and its electrochemical stable window is 5V.