Design and Simulation of Microwave Plasma Torch with Combined Resonant Cavity*

In this paper, a new type of combined resonator microwave plasma torch is proposed, which can break down air and form a large volume plasma flame at atmospheric pressure under the condition of small microwave power input. Microwave plasma has high electron density and high electron temperature, so it has wide application prospect in material synthesis, harmful gas digestion, spectral analysis and so on. In this paper, various parameters of the resonator are optimized by electromagnetic simulation with finite integral time domain, so that the electric field intensity in the resonator can meet the requirements of excitation and maintenance of microwave plasma.