Review on fabrication, characterization, and applications of porous anodic aluminum oxide films with tunable pore sizes for emerging technologies

阳极氧化 纳米孔 材料科学 制作 纳米技术 阻挡层 纳米压印光刻 电解质 多孔性 阳极 图层(电子) 复合材料 电极 化学 医学 替代医学 病理 物理化学
作者
Ashraf K. Eessaa,A. M. El-Shamy
出处
期刊:Microelectronic Engineering [Elsevier BV]
卷期号:279: 112061-112061 被引量:84
标识
DOI:10.1016/j.mee.2023.112061
摘要

Anodizing aluminum allowed the production of one-of-a-kind porous anodic aluminum oxide (PAAO) films. These films have a perfectly flat barrier layer and an exceedingly porous structure. Because of its one-of-a-kind optical and electrochemical properties, large surface area, tunable properties, and high thermal stability, nanoporous anodic aluminum oxide (AAO) has become one of the most popular materials with an enormous potential to develop emerging applications in a variety of fields. These fields include biosensors, desalination, high-risk pollutants detection, capacitors, solar cell devices, photonic crystals, template-assisted fabrication of nanostructures, and other similar fields. This article discusses the process behind the development of AAO, the manufacturing method, the link between the characteristics of AAO and the fabrication circumstances, as well as the applications of AAO. Fabrication circumstances, such as electrolyte, applied voltage, anodizing, and widening time, may completely influence the properties of AAO, such as pore diameter, interpore distance, wall thickness, and the thickness of the anodized aluminum layer. The pore diameter of AAO will have a significant impact on the application that it is used for. In addition, production techniques such as one/two/multi-step anodization, nanoimprint lithography anodization, and pulse/cyclic anodization all have a significant influence on the final array layout. This paper aims to offer a perspective overview of the systematic link between applications and the AAO pore sizes that correspond to those applications. In addition to this, the study concentrates on the many methods through which the AAO's various structures and functions may be used.
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