GaN-based resonant cavity micro-LEDs for AR application

Augmented reality (AR) is emerging as a next-generation interactive display that promotes the interaction between users, digital content, and the real world. Although micro-LED is regarded as the most promising light engine candidate for AR, its inherent Lambertian radiation characteristics and relatively broader emission spectrum result in low optical coupling efficiency and diffraction dispersion-related “rainbow” phenomenon when combined with a waveguide combiner. Here, we numerically and experimentally demonstrate resonant cavity (RC) micro-LEDs by incorporating SiO2/TiO2 distributed Bragg reflectors with chip sizes of 60, 100, and 150 μm. The device has a divergence angle of 78.7° and a narrow spectrum width of 6.8 nm, which is significantly lower than that of the controlled micro-LEDs. The reported GaN-based RC micro-LEDs have the potential to be used in the display panel for AR applications in a variety of scenarios, including AR glasses, and head up display for cars and airplanes.