Debye-Waller factors of five h.c.p. elements (Ti, Zr, Ru, Tm, Hf) have been determined from X-ray diffraction intensities. Within the limits of experimental errors, the Debye-Waller factors associated with the two principal directions are equal. The Debye temperatures (straight theta(M)) have been evaluated. The energy of formation of vacancies (E(f)) has been estimated from a semi-empirical relation between E(f) and straight theta.