<title>Supersonic flow sensor using semiconductor diamond films</title>

The frequency response of thin film sensors can be enhanced by using a film of semiconducting diamond. Conventional sensors made of metallic films such as Ni can only be used for measuring flow turbulences of the order of 60 KHz. The proposed diamond sensor can measure instabilities as high as 2 X 10⁵ Hz. A computer simulation was carried out to compare the response of the proposed sensor with a Ni film sensor. The rationale for choosing the appropriate film and substrate materials has also been explained.