抛光
压力测量
箔法
组分(热力学)
压力传感器
量具(枪械)
过程(计算)
常量(计算机编程)
材料科学
机械
计算机科学
机械工程
物理
工程类
复合材料
热力学
冶金
操作系统
程序设计语言
作者
Michael F. Benisch,Oliver Fähnle,Rolf Rascher,Werner Bogner
摘要
The Preston-equation implies, that, besides the relative speed υrel and a specific constant KP, the pressure p plays a significant role for the removal rate when polishing an optical component. This paper demonstrates a possibility for a qualitative evaluation of the pressure distribution before the polishing process. A pressure-sensitive foil is used as a gauge for pressure measurement. The effectiveness of this measuring method is explained. Specific weaknesses and limitations in the use of these foils are discussed. A method for an integrated evaluation of the pressure on different spots of the polishing pad is proposed at the end of the paper.
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