A Novel Fabricating a Thick Film Cu-Ni Alloy Resistor by Screen Printing an Al Electrode and Galvanic Replacement Reaction

原电池 材料科学 电极 冶金 化学 物理化学
作者
Ching-Ming Kuo,Tzu-Chiang Kuo,Wen-Hsi Lee
出处
期刊:IEEE Transactions on Components, Packaging and Manufacturing Technology [Institute of Electrical and Electronics Engineers]
卷期号:11 (11): 1997-2002 被引量:6
标识
DOI:10.1109/tcpmt.2021.3121079
摘要

In this study, a thick film copper-nickel alloy (Cu-Ni alloy) was fabricated by using a novel technique which combines thick film process and galvanic chemical replacement. First, a thick film Al electrode was screen printed and sintered at 600 °C on the aluminum oxide (Al 2 O 3 ) substrate which served as a reactant. Sequentially, the Al electrode on Al 2 O 3 substrate was immersed into a copper sulfate (CuSO 4 ) solution at 40 °C for 15–30 min to carry out the first galvanic replacement reactions of the partial Al electrode into Cu. After which it was immersed into an NiSO 4 solution 80 °C for 15 min to carry out the second galvanic replacement reactions of the remaining Al electrode into Ni to form Cu-Ni layers on the Al 2 O 3 substrate. To make a thick film Cu-Ni alloy, the Cu-Ni layers on Al 2 O 3 substrate were annealed at high temperatures for interdiffusion of Cu and Ni. A thick film Al electrode on an Al 2 O 3 substrate is immersed into a CuSO 4 (aq) solution at 40 °C for 15 min and sequentially immersed in an NiSO 4 (aq) solution at 80 °C for 15 min. Then, after further annealing at 800 °C for 30 min in a reducing atmosphere, the Cu and Ni composition ratio in the thick film Cu-Ni alloy is approximately 1:1, reflecting Cu-Ni alloy resistor with a very promising temperature coefficient of resistance (TCR) performance (115 ppm/°C).
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