Femtosecond laser micromachining on backside of glass using simultaneously spatially and temporally focused vortex beams
作者
Xiaolong Li,Weibo Cheng,Pavel G. Polynkin
标识
DOI:10.1109/cleopr.2017.8118968
摘要
Femtosecond laser micromachining on back surface have been investigated experimentally using simultaneously spatially and temporally focused (SSTF) vortex beams. Uniform ring-shape ablations have been made on back surface of borosilicate glass. The feasibility of laser micromachining using femtosecond SSTF vortex beam has been demonstrated.