高电子迁移率晶体管
金属有机气相外延
外延
材料科学
光电子学
图层(电子)
电子迁移率
阻挡层
费米气体
基质(水族馆)
异质结
晶体管
纳米技术
电子
电压
地质学
物理
海洋学
量子力学
作者
Kanika Narang,Ruby Khan,Akhilesh Pandey,Vikash Kumar Singh,Rajesh K. Bag,M. V. G. Padmavati,Renu Tyagi,Rajendra Singh
标识
DOI:10.1016/j.materresbull.2022.111875
摘要
In this study, the effect of carrier gas (H2 and N2) on the AlGaN barrier layer of AlGaN/GaN High Electron Mobility Transistor (HEMT) epi-structures has been investigated in terms of its morphological and structural characteristics. The epi-structures have been grown on a 4H-SiC substrate by Metal Organic Vapor Phase Epitaxy (MOVPE). Morphological, crystalline, and interfacial quality of the AlGaN barrier layer has been significantly improved by using a nitrogen carrier gas. The effect of an improved barrier layer on 2DEG (Two-Dimensional Electron Gas) transport properties of HEMT epi‑structure has also been studied. The improved interface resulted in excellent 2DEG transport properties (mobility of 2060 cm2/V·s with 1 × 1013 cm−2 concentration) of HEMT epi-structure. It was also observed that growth rate and carbon incorporation in the GaN layer reduced with the use of nitrogen carrier gas.
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