Research on the Solid Thin Film Lithium-Ion Battery Integrated on-Chip

the solid thin film lithium-ion battery integrated on chip was designed and analyzed based on solid lithium-ion battery structure, materials and microelectronics processing technology. The design model of the solid lithium-ion battery consists of Li negative electrode, Li3PO4 electrolyte and LiCoO2 positive electrode. The preparation process of the solid lithium-ion battery integrated on chip was researched, and the process consists of seven main steps. In addition, the characteristics of the design model of the solid lithium-ion battery were analyzed using COMSOL. The results show that the solid lithium-ion battery has small internal resistance and large discharge capacity. The discharge capacity of the solid lithium-ion battery under the discharge current of 25C reaches 75% of the discharge current of 1C.