To adapt to the needs of the machining miniaturization today,design a micro electrical discharge machining system,and make systemic research on machining technics via the experiments on machining micro holes,micro shafts and micro three-dimension structures.At the same time,analyse the R、C parameters of the RC pulse generator and their effects on the machining efficiency,electrode wear ratio and the surface quality,and validate the feasibility of micro three-dimension structures machining by servo scanning machining technics.