Measurement of Permittivity by Microwave with Heating of a Thin Film by Identical Cavity

In measuring complex permittivity for a thin material in microwave frequency, to apply a cylindrical cavity is one of the best ways. Also, by using the cavity it becomes possible to measure temperature dependency of the complex permittivity of material. In this paper, TE/sub 011/ cylindrical cavity at 2.45GHz is developed. This cavity allows high microwave power input and it enables to measure permittivity with heating characteristics. In the development, electromagnetic field simulator is used also for the suitable design.